실리콘센싱이 제공하는 MEMS 자이로스코프 제품소개입니다.

MEMS자이로스코프

실리콘센싱은 다양한 어플리케이션에 적합한 기능, 성능을 가진 MEMS(Micro Electro Mechanical System) 방식의 자이로스코프(각속도 센서 여기서는 'MEMS 자이로'로 표기) 및 모듈제품을 생산하고 있습니다. 또한 이들 관성센서에 관한 전문기술도 지원하고 있습니다.

실리콘센싱이 제조하는 MEMS 자이로는 일관되게 링 공진자를 채택하고 있습니다.

일반적으로 MEMS 자이로는 진동형에 의한 코리오리카 검출을 실시하고 있습니다. 진동형 자이로로 각속도를 얻기 위해서는, 1차 진동을 형성시킨 후 각속도가 더해졌을 때 발생하는 2차 진동을 출력으로 변환시키는데, 링 공진자는 센서 외부에서 큰 충격이나 진동이 발생해도 그 영향을 최소한으로 억제시켜 각속도만을 분리, 출력가능한 특징이 있습니다.
따라서, 충격, 진동에 강한 자이로센서로 사용되고 있습니다. 또, 실리콘센싱의 자이로스코프는 일반적인 MEMS 자이로에 비해 고정도용으로 활용하기에 큰 장점이 있습니다.

MEMS 자이로 선택은「자이로 검색」 또는 「자이로 일람표」에서 선택하실 수 있습니다.

     
   

Supply Voltage (Vdd)

Dynamic Range

Bias Variation with Temp

In-Band Quiescent Noise

Bias Instability

Bandwidth (Gain -3dB)

Operating Temp

Current Consumption

Dimensions (mm)

Mounting Options

Interface

 

CRH02

5V

25°/s to 400°/s

±0.2°/s to ±0.25°/s

0.15°/SRMS to 0.2°/SRMS

<0.12°/hr

50Hz to 100Hz

-40°C to +85°C

60mA

35 x 35 x 25 to 38 x 35 x 25

Case unsealed

Analogue

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CRM

3.3V

±75°/s to ±2700°/s

±3°/s

<0.18°/s (100Hz)

12°/hr

5 -160 Hz (User Selectable)

-40°C to +85°C

4mA

5.7 x 4.8 x 1.2 or 6.3 x 2.7 x 5.5

SMD , flat, orthogonal

Analogue, Digital SPI®

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CMS

3.3V

±150°/s or ±300°/s

±2.75°/s

0.1°/s(45Hz)

12°/hr

45Hz to 110Hz

-40°C to +125°C

8 mA

10.4 x 6.0 x 2.2 or 10.4 x 6.7 x 2.7

SMD , flat, orthogonal

Digital SPI®

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CRS03

5V

±100°/s

< ±3°/s

0.025°/s

3.5°/hr

>10Hz to >55Hz

-40°C to +85°C

35mA

27 x 27 x 9

Case Unsealed

Analogue

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CRS09

5V

±100°/s to ±200°/s

< ±1°/s to < ±3°/s

0.03°/s

3°/hr

55Hz

-20°C to +85°C

100mA

63 x 63 x 19

Case unsealed

Analogue

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CRS39

5V

±25°/s

±0.08°/s

0.015°/s

0.1°/hr

25Hz

-10°C to +110°C

80mA

75 x 24.5 x 19.0

PCB unpackaged

Analogue

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Supply Voltage (Vdd)

Dynamic Range

Bias Variation with Temp

In-Band Quiescent Noise

Bias Instability

Bandwidth (Gain -3dB)

Operating Temp

Current Consumption

Dimensions (mm)

Mounting Options

Interface

Supply voltage (Vdd)

3.3V

Dynamic Range

±75°/s to ±2700°/s

Bias Variation With Temp

±3°/s

Bias Instability

24°/hr to 40°/hr

In-Band Quiescent Noise

< 0.18°/s (100Hz)

Bandwidth (Gain -3dB)

5 -160 Hz (User Selectable)

Operating Temp

-40°C to +85°C

Current Consumption

4mA

Dimension (mm)

5.7 x 4.8 x 1.2 to 6.3 x 2.7 x 5.5

Mounting Options

SMD , flat, orthogonal

Interface

Analogue, Digital SPI®

Supply voltage (Vdd)

3.3V

Dynamic Range

±150°/s or ±300°/s

Bias Variation With Temp

±2.75°/s

Bias Instability

12°/hr

In-Band Quiescent Noise

0.1°/s(45Hz)

Bandwidth (Gain -3dB)

40Hz to 110Hz

Operating Temp

-40°C to +125°C

Current Consumption

8 mA

Dimension (mm)

10.4 x 6.0 x 2.2 or 10.4 x 6.7 x 2.7

Mounting Options

SMD , flat, orthogonal

Interface

Digital SPI®

Supply voltage (Vdd)

5V

Dynamic Range

±100°/s

Bias Variation With Temp

< ±3°/s

Bias Instability

3.5°/hr

In-Band Quiescent Noise

0.025°/sec

Bandwidth (Gain -3dB)

>10Hz to >55Hz

Operating Temp

-40°C to +85°C

Current Consumption

35mA

Dimension (mm)

29 x 29 x 18.4

Mounting Options

Case Unsealed

Interface

Analogue

Supply voltage (Vdd)

5V

Dynamic Range

±100°/s to ±200°/s

Bias Variation With Temp

< ±1°/s to < ±3°/s

Bias Instability

3°/hr

In-Band Quiescent Noise

0.03°/sec

Bandwidth (Gain -3dB)

55Hz

Operating Temp

?20°C to +85°C

Current Consumption

100mA

Dimension (mm)

63 x 63 x 19

Mounting Options

Case unsealed

Interface

Analogue

Supply voltage (Vdd)

5V

Dynamic Range

±25°/s

Bias Variation With Temp

±0.08°/s

Bias Instability

0.08°/hr

In-Band Quiescent Noise

0.015°/sec

Bandwidth (Gain -3dB)

25Hz

Operating Temp

-10°C to +110°C

Current Consumption

80mA

Dimension (mm)

75 x 24.5 x 19

Mounting Options

PCB unpackaged

Interface

Analogue

Supply voltage (Vdd)

5V

Dynamic Range

±50°/s to ±1,500°/s

Bias Variation With Temp

< ±3°/s

Bias Instability

3°/hr

In-Band Quiescent Noise

0.30°/sec to 0.55°/sec

Bandwidth (Gain -3dB)

>50Hz to >60Hz

Operating Temp

-40°C to +75°C

Current Consumption

< 50 mA

Dimension (mm)

31.8 x 31.8 x 17.3

Mounting Options

Case sealed

Interface

Analogue